Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: ProcessProperties and Applications
Publisher:Bentham Science
By: Filipe Vaz, Nicolas Martin and Martin Fenker
Paid access
|Feb 2025
Authors
Vaz, Filipe
Martin, Nicolas
Fenker, Martin
PDF ISBN: 978-1-60805-156-4
Publisher: Bentham Science
Copyright owner: © 2013 Bentham Science Publishers
Publication date: 2025
Language: English
Pages: 362
Related subjects:
BISAC subjects:
TEC021000
Thema subjects:
TGM
