Skip to main content
Have a personal or library account? Click to login
Selective Wet-Etching of Amorphous/Crystallized Sb-Se Thin Films Cover

Selective Wet-Etching of Amorphous/Crystallized Sb-Se Thin Films

Open Access
|May 2012

References

  1. Stronski, A.V., Vlcek, M., Sklenar, A., Shepeljavi, P.E., Kostyukevich, S.A., & Wagner, T. (2000). Application of AsSSelayers for high efficiency grating production.(2), 973-978. DOI: 10.1016/S0022-3093(00)00032-6.
  2. Vlcek, M., Prokop, J., Frumar, M. (1994). Positive and negative etching of As-S thin layers.(6), 969-973. Retrieved from http://www.lehigh.edu/imi/Chalcogenide_Glasses/ChG11_Ref-261_Kovalskiy_Lithography%20JM3.pdf.
  3. Utsugi, Y. (1993). Chemical modification for nanolithography using scanning tunneling microscopy. Nanotechnology - International Workshop on Atoms and Clusters (WAC-92); 1992 Jan 8; Atami, Japan. 1992 Oct. 161-3.(3), 201-201. DOI:10.1016/0141-6359(93)90034-8.
  4. Tokushuku, N., Moritani, K., Yanagihara, H., Konishi, K., & Noro, Y. (1992). High C/N recording in SbSe/Bi write-once disk., 456-460. Retrieved from http://cat.inist.fr/?aModele=afficheN&cpsidt=5266186.
  5. Barton, R., Davis, C.R., Rubin, K., & Lim, G. (1986). New phase change material for optical recording with short erase time.(19), 1255-1257. http://dx.doi.org/10.1063/1.97031.
  6. Orava, J., Wagner, T., Krbal, M., Kohoutek, T., Vlcek, M., Benes, L., Kotulanova, E., Bezdicka, P., Klapetek, P., & Frumar, M. (2007). Selective wet-etching of amorphous/crystallized Ag-As-S and Ag-As-S-Se chalcogenide thin films.(5-6), 1008-1013. DOI: 0.1016/j.jpcs.2007.03.056.
  7. Orava, J., Wagner, T., Krbal, M., Kohoutek, T., Vlcek, M., & Frumar, M. (2006). Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions.(9-20) 1637-1640. DOI: 10.1016/j.jnoncrysol.2005.09.041.
  8. Orava, J., Wagner, T., Krbal, M., Kohoutek, T., Vlcek, M., Klapetek, P., & Frumar, M. (2008). Selective dissolution of Ag(AsSSe)chalcogenide thin films.(2-9), 533-539. DOI: 10.1016/j.jnoncrysol.2007.07.058.
  9. Orava, J., Wagner, T., Krbal, M., Kohoutek, T., Vlcek, M., & Frumar, M. (2007). Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions.(13-15), 1441-1445. DOI: 10.1016/j.jnoncrysol.2006.10.069.
  10. Vlcek, M., Schroeter, S., Čech, J., Wágner, T., & Glaser, T. (2003). Selective etching of chalcogenides and its application for fabrication of diffractive optical elements., 515-518. DOI: 10.1016/S0022-3093(03)00463-0.
  11. Shiman, O., Gerbreders, V., Sledevskis, E., Bulanovs, A., & Pashkevich, V. (2011). Selective Wet-Etching of Amorphous/Crystallized SbSeThin Films.(2), 820-823. Retrieved from http://www.waset.org/journals/waset/v75/v75-147.pdf.
  12. Gerbreder, Vj., Teteris, J., Sledevskis, E., & Bulanovs, A. (2007). Photoinduced changes of optical reflectivity in AsS-Al system., 3153-3156.
  13. Shiman, O., Gerbreders, V., Sledevskis, E., & Bulanovs, A. (2011). Electric conductivity of Sb/Se thin film micro-scale structures.(1), 62-68. DOI: 10.2478/v10047-011-0006-9.
  14. Rubish, V.M., Shtets, P.P., Rubish, V.V., Semak, D.G., & Tsizh, B.R. (2003). Optical media for information recording based on amorphous layers of Sb-Se-In system., 1193-1197.
DOI: https://doi.org/10.2478/v10047-012-0010-8 | Journal eISSN: 2255-8896 (formerly 0868-8257) | Journal ISSN: 0868-8257
Language: English
Page range: 45 - 50
Published on: May 18, 2012
Published by: Institute of Physical Energetics
In partnership with: Paradigm Publishing Services

© 2012 O. Shiman, V. Gerbreders, E. Sledevskis, A. Bulanovs, published by Institute of Physical Energetics
This work is licensed under the Creative Commons License.