PATTERNED LASER CRYSTALLIZATION OF a-Si
By: B. Polyakov, G. Marcins, M. Chubarov, A. Kuzmin, V. Klykov and I. Tale
Open Access
|Jul 2009References
- Yi Ch., Rhee S., Ju J., Yim S., & Min H. (2001). J. Mater. Sci. Mater. Electron., 12, 697.
- Brotherton S., Ayres J., Edwards M., Fisher C., Glaister C., Gowers J., McCulloch D., & Trainor M. (1999). Thin Solid Films, 337, 188.
- Kim Y., Hwang C., Song Y., Chung C., Ko Y., Sohn C., Kim B., & Lee J. (2003). Thin Solid Films, 440, 169.
- Bergmann R. (1999) Appl. Phys. A, 69, 187.
- O'Neill K., Shaikh M., Lyttle G., Anthony S., Fan Y., Persheyev S., & Rose M. (2006). Thin Solid Films, 501, 310.
- Yamauchi N., & Reif R. (1994) J. Appl. Phys., 75, 3235.
- Herd S., Chaudhari P., & Brodsky M. (1972). J. Non-Cryst. Solid, 7, 309.
- Yoon S., Park S., Kim K., & Jang J. (2001). Thin Solid Films, 383, 34.
- Rezek B., Sipek E., Ledinsky M., Krejza P., Stuchlik J., Fejfar A., & Kocka J. (2008). J. Non-Crystal. Solids, 354, 2305.
- Poate J. & Mayer J. (1982). Laser Annealing of Semiconductors. New York: Academic Press.
- Kuzmin A., Kalendarev R., Kursitis A., & Purans J. (2006). Latv. J. Phys. Tech. Sci., (2) 66.
- Rezek B., Nebel C., & Stutzmann M. (2002). J. Appl. Phys., 91, 7 4220.
- Viera G., Huet S., & Boufendi L. (2001) J. Appl. Phys., 91, 8 4175.
- Lengsfeld P. (2001) Successive laser crystallization of doped and undoped a-Si:H. PhD thesis (Berlin).
DOI: https://doi.org/10.2478/v10047-009-0009-y | Journal eISSN: 2255-8896 (formerly 0868-8257) | Journal ISSN: 0868-8257
Language: English
Page range: 50 - 54
Published online: Jul 22, 2009
Published in print: Jan 1, 2009
Published by: Institute of Physical Energetics
In partnership with: Paradigm Publishing Services
Related subjects:
© 2009 B. Polyakov, G. Marcins, M. Chubarov, A. Kuzmin, V. Klykov, I. Tale, published by Institute of Physical Energetics
This work is licensed under the Creative Commons License.