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Investigation of structural, optical and electrical properties of (Ti,Nb)Ox thin films deposited by high energy reactive magnetron sputtering Cover

Investigation of structural, optical and electrical properties of (Ti,Nb)Ox thin films deposited by high energy reactive magnetron sputtering

Open Access
|Oct 2014

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DOI: https://doi.org/10.2478/s13536-013-0195-4 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Language: English
Page range: 457 - 464
Published on: Oct 17, 2014
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year

© 2014 Michal Mazur, Danuta Kaczmarek, Eugeniusz Prociow, Jaroslaw Domaradzki, Damian Wojcieszak, Jakub Bocheński, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.