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Investigation of structural, optical and electrical properties of (Ti,Nb)Ox thin films deposited by high energy reactive magnetron sputtering

Open Access
|Oct 2014
DOI: https://doi.org/10.2478/s13536-013-0195-4 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Language: English
Page range: 457 - 464
Published on: Oct 17, 2014
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year

© 2014 Michal Mazur, Danuta Kaczmarek, Eugeniusz Prociow, Jaroslaw Domaradzki, Damian Wojcieszak, Jakub Bocheński, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.