Fig. 1.

Fig. 2.

Fig. 3.

Fig. 4.

Fig. 5.

Fig. 6.

Fig. 7.

Fig. 8.

Fig. 9.

Fig. 10.

Fig. 11.

Fig. 12.

Fig. 13.

Fig. 14.

Fig. 15.

Fig. 16.

Fig. 17.

Fig. 18.

Fig. 19.

Fig. 20.

Fig. 21.

Fig. 22.

Theoretical calculations of CCCMB capacity C1 and resulting oscillator frequency f at different plate distances G_
| G [mm] | C1 [pF] | f [MHz] |
|---|---|---|
| 4.00 | 3.32 | 516.31 |
| 3.00 | 4.43 | 450.60 |
| 2.00 | 6.64 | 373.50 |
| 1.00 | 13.29 | 275.60 |
| 0.50 | 26.58 | 210.21 |
| 0.20 | 66.45 | 158.51 |
| 0.10 | 132.88 | 137.01 |
Parameters of the proposed CCCMB (see Fig_ 5)_
| Parameter | Value [mm] | Parameter | Value [mm] |
|---|---|---|---|
| L | 110.0 | H | 30.0 |
| L1 | 2.5 | H1 | 25.0 |
| L2 | 20.0 | H2 | 2.5 |
| L3 | 75.0 | H3 | 2.5 |
| R1 | 15.0 | H4 | 0.3 |
| R2 | 12.5 | W | 20.0 |
| R3 | 2.5 | G | 4.4 |
Theoretical calculations of CCCMB capacity Cb, resulting capacity C′1, and resulting oscillator frequency f at different plate distances G_
| G [mm] | Cb [pF] | C′1 [pF] | f [MHz] |
|---|---|---|---|
| 4.00 | 3.32 | 71.32 | 155.74 |
| 3.00 | 4.43 | 72.43 | 155.16 |
| 2.00 | 6.64 | 74.64 | 154.04 |
| 1.00 | 13.29 | 81.29 | 151.01 |
| 0.50 | 26.58 | 94.58 | 146.10 |
| 0.20 | 66.45 | 134.44 | 136.74 |
| 0.10 | 132.88 | 200.88 | 128.92 |
Measured distances G′ and G″ depending on the magnitude of the acting force_
| m [g] | G′ [px] | G′ [mm] | G″ [px] | G″ [mm] |
|---|---|---|---|---|
| 0 | 1089 | 4.44 | 1089 | 4.44 |
| 500 | 979 | 3.93 | 918 | 3.65 |
| 1000 | 874 | 3.45 | 753 | 2.89 |
| 1500 | 768 | 2.96 | 588 | 2.12 |
| 2000 | 660 | 2.46 | 430 | 1.39 |
| 2500 | 552 | 1.96 | 267 | 0.64 |