Interferometer -based Technology for Optical Nanoscale Inspection
By: M. Ryabko, S. Koptyaev, A. Shcherbakov and A. Lantsov
Open Access
|Mar 2014DOI: https://doi.org/10.2478/msr-2014-0004 | Journal eISSN: 1335-8871
Language: English
Page range: 25 - 28
Published on: Mar 6, 2014
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
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© 2014 M. Ryabko, S. Koptyaev, A. Shcherbakov, A. Lantsov, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons License.