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Interferometer -based Technology for Optical Nanoscale Inspection Cover

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Interferometer -based Technology for Optical Nanoscale Inspection

Measurement Science Review

Volume 14 (2014): Issue 1 (February 2014)

By: M. Ryabko, S. Koptyaev, A. Shcherbakov and A. Lantsov

Open Access

|Mar 2014

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DOI: https://doi.org/10.2478/msr-2014-0004 | Journal eISSN: 1335-8871

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Language: English

Page range: 25 - 28

Published on: Mar 6, 2014

Published by: Slovak Academy of Sciences, Institute of Measurement Science

In partnership with: Paradigm Publishing Services

Publication frequency: Volume open

Keywords:

Critical dimension,

nanoscale inspection,

nanoscale measurements,

Related subjects:

Electrical engineering,

Control engineering, metrology and testing

© 2014 M. Ryabko, S. Koptyaev, A. Shcherbakov, A. Lantsov, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons License.

Volume 14 (2014): Issue 1 (February 2014)

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