Technological challenges in manufacturing of vacuum gauge thermionic cathode using thick-film technology

Jasińska, Laura; Dzbik, Krzysztof; Nowak, Damian; Stojek, Krzysztof; Chudzyńska, Aleksandra; Politański, Kamil; Malecha, Karol

doi:10.2478/msp-2024-0007

Abstract

This paper focuses on the development of a technological challenges of manufacturing the planar ceramic vacuum sensor based on the principles of hot-cathode ionization in the Bayard-Alpert configuration. The goal is to simplify the technological process by utilizing planar platinum structures with gold electrical paths instead of 3-dimensional structures. Various methods were tested, including the use of carbon-based SVM (Sacrifice Volume Materials) materials, but without success. Wet-etching using potassium hydroxide on Al₂O₃ substrates showed promise results. The findings highlight the challenges and progress made in developing the thermo-emittercomponent of the vacuum sensor.

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Technological challenges in manufacturing of vacuum gauge thermionic cathode using thick-film technology

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