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Micro-structural and bonding structure analysis of TiAlN thin films deposited with varying N2 flow rate via ion beam sputtering technique Cover

Micro-structural and bonding structure analysis of TiAlN thin films deposited with varying N2 flow rate via ion beam sputtering technique

Open Access
|May 2020
DOI: https://doi.org/10.2478/msp-2020-0006 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Language: English
Page range: 122 - 131
Submitted on: Oct 13, 2018
Accepted on: Apr 23, 2019
Published on: May 8, 2020
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:

© 2020 Soham Das, Mukul Gupta, Ashis Sharma, Bibhu P. Swain, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.