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Sputtering pressure influenced structural, electrical and optical properties of RF magnetron sputtered MoO3 films Cover

Sputtering pressure influenced structural, electrical and optical properties of RF magnetron sputtered MoO3 films

Materials Science-Poland
Volume 38 (2020): Issue 1 (March 2020)
By: ,   and    
Open Access
|May 2020
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DOI: https://doi.org/10.2478/msp-2020-0001 | Journal eISSN: 2083-134X (formerly 2083-124X) | Journal ISSN: 2083-1331
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Language: English
Page range: 41 - 47
Submitted on: Aug 17, 2017
Accepted on: Apr 23, 2019
Published on: May 8, 2020
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Keywords:
MoO3 thin films,
RF magnetron sputtering,
sputtering pressure,
structural properties,
optical properties
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2020 S. Subbarayudu, K. Venkata Subba Reddy, S. Uthanna, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Volume 38 (2020): Issue 1 (March 2020)
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