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Influence of magnetron powering mode on various properties of TiO2 thin films Cover

Influence of magnetron powering mode on various properties of TiO2 thin films

Materials Science-Poland
Volume 36 (2018): Issue 4 (December 2018)
By: ,  ,  ,  ,  ,  ,   and    
Open Access
|Feb 2019
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DOI: https://doi.org/10.2478/msp-2018-0099 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 748 - 760
Submitted on: Nov 8, 2018
Accepted on: Nov 24, 2018
Published on: Feb 1, 2019
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
titanium alloys,
TiO2,
sputtering,
mechanical properties,
structural properties,
thin films
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2019 Artur Wiatrowski, Michał Mazur, Agata Obstarczyk, Danuta Kaczmarek, Roman Pastuszek, Damian Wojcieszak, Marcin Grobelny, Małgorzata Kalisz, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Volume 36 (2018): Issue 4 (December 2018)
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