Influence of magnetron powering mode on various properties of TiO2 thin films
Authors
Artur Wiatrowski
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland
Michał Mazur
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland
Agata Obstarczyk
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland
Danuta Kaczmarek
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland
Roman Pastuszek
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland
Damian Wojcieszak
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland
Marcin Grobelny
Motor Transport Institute, Centre for Material Testing, Warsaw, Poland
Małgorzata Kalisz
Motor Transport Institute, Centre for Material Testing, Warsaw, Poland
Language: English
Page range: 748 - 760
Submitted on: Nov 8, 2018
Accepted on: Nov 24, 2018
Published on: Feb 1, 2019
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
Related subjects:
© 2019 Artur Wiatrowski, Michał Mazur, Agata Obstarczyk, Danuta Kaczmarek, Roman Pastuszek, Damian Wojcieszak, Marcin Grobelny, Małgorzata Kalisz, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.