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Influence of magnetron powering mode on various properties of TiO2 thin films Cover

Influence of magnetron powering mode on various properties of TiO2 thin films

Materials Science-Poland
Volume 36 (2018): Issue 4 (December 2018)
By: Artur Wiatrowski,  Michał Mazur,  Agata Obstarczyk,  Danuta Kaczmarek,  Roman Pastuszek,  Damian Wojcieszak,  Marcin Grobelny and  Małgorzata Kalisz  
Open Access
|Feb 2019

Authors

Artur Wiatrowski

Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland

Michał Mazur

michal.mazur@pwr.edu.pl

Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland

Agata Obstarczyk

Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland

Danuta Kaczmarek

Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland

Roman Pastuszek

Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland

Damian Wojcieszak

Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wroclaw, Poland

Marcin Grobelny

Motor Transport Institute, Centre for Material Testing, Warsaw, Poland

Małgorzata Kalisz

Motor Transport Institute, Centre for Material Testing, Warsaw, Poland
DOI: https://doi.org/10.2478/msp-2018-0099 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 748 - 760
Submitted on: Nov 8, 2018
|
Accepted on: Nov 24, 2018
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Published on: Feb 1, 2019
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
titanium alloys,
TiO2,
sputtering,
mechanical properties,
structural properties,
thin films
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2019 Artur Wiatrowski, Michał Mazur, Agata Obstarczyk, Danuta Kaczmarek, Roman Pastuszek, Damian Wojcieszak, Marcin Grobelny, Małgorzata Kalisz, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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