Influence of magnetron powering mode on various properties of TiO2 thin films

Wiatrowski, Artur; Mazur, Michał; Obstarczyk, Agata; Kaczmarek, Danuta; Pastuszek, Roman; Wojcieszak, Damian; Grobelny, Marcin; Kalisz, Małgorzata

doi:10.2478/msp-2018-0099

Abstract

In this paper, comparative studies on the structural, surface, optical, mechanical and corrosion properties of titanium dioxide (TiO₂) thin films deposited by continuous and sequential magnetron sputtering processes were presented. In case of continuous process, magnetron was continuously supplied with voltage for 90 min. In turn, in sequential process, the voltage was supplied for 1 s alternately with 1 s break, therefore, the total time of the process was extended to 180 min. The TiO₂ thin films were crack free, exhibited good adherence to the substrate and the surface morphology was homogeneous. Structural analysis showed that there were no major differences in the microstructure between coatings deposited in continuous and sequential processes. Both films exhibited nanocrystalline anatase structure with crystallite sizes of ca. 21 nm. Deposited coatings had high transparency in the visible wavelength range. Significant differences were observed in porosity (lower for sequential process), scratch resistance (better for sequential process), mechanical performance, i.e. hardness:elastic modulus ratio (higher for sequential process) and corrosion resistance (better for sequential process).

References

[1] Bordji K., Jouzeau J.Y., Mainard D., Payan E., Netter P., Rie K.T., Stucky T., Hage-Ali M., Biomaterials, 17 (1996), 929.10.1016/S0142-9612(96)90001-0
Open DOI Search in Google Scholar Back to article
[2] Zhu X., Chen J., Scheideler L., Reichl R., Geisgesrstorfer J., Biomaterials, 25 (2004), 4187.10.1016/j.biomaterials.2003.11.011
Search in Google Scholar Back to article
[3] Neoh K.G., Hu X., Zheng D., Tang Kang E., Bio-materials, 33 (2012), 2813.10.1016/j.biomaterials.2012.01.018
Search in Google Scholar Back to article
[4] Wang Z.B., Hu H.X., Liu C.B., Zheng Y.G., Electrochim. Acta, 135 (2014), 526.10.1016/j.electacta.2014.05.055
Search in Google Scholar Back to article
[5] Carapeto A.P., Serro A.P., Nunes B.M.F., Martins M.C.L., Todorovic S., Duarte M.T., André V., Colaço R., Saramago B., Surf. Coat. Tech., 204 (2010), 3451.10.1016/j.surfcoat.2010.04.022
Search in Google Scholar Back to article
[6] Ma G., Gong S., Lin G., Zhang L., Sun G. A., Appl. Surf. Sci., 258 (2012), 3045.10.1016/j.apsusc.2011.11.034
Search in Google Scholar Back to article
[7] Han Y., Hong S.H., Xu K.W., Surf. Coat. Tech., 154 (2002), 314.10.1016/S0257-8972(02)00036-1
Search in Google Scholar Back to article
[8] Huang P., Wang F., Xu K., Han Y., Surf. Coat. Tech., 201 (2007), 5168.10.1016/j.surfcoat.2006.07.137
Search in Google Scholar Back to article
[9] Lange R., Lüthen F., Beck U., Rychly J., Baumann A., Nebe B., Biomol. Eng., 19 (2002), 255.10.1016/S1389-0344(02)00047-3
Search in Google Scholar Back to article
[10] Huang P., Xu K-W., Han Y., Mater. Lett., 59 (2005), 185.10.1016/j.matlet.2004.09.045
Search in Google Scholar Back to article
[11] Kalisz M., Grobelny M., Ś Winiarski M., Mazur M., Wojcieszak D., Zdrojek M., Judek J., Domaradzki J., Kaczmarek D., Surf. Coat. Tech., 290 (2016), 124.10.1016/j.surfcoat.2015.08.011
Search in Google Scholar Back to article
[12] Toma F-L., Bertrand G., Chwa S.O., Meunier C., Klein D., Coddet C., Surf. Coat. Tech., 200 (2006), 5855.10.1016/j.surfcoat.2005.08.148
Search in Google Scholar Back to article
[13] Daoud W.A., Xin J.H., J. Sol-Gel Sci. Techn., 29 (2004), 25.10.1023/B:JSST.0000016134.19752.b4
Search in Google Scholar Back to article
[14] Yoldas B.E., Appl. Opt., 19 (1980), 1425.10.1364/AO.19.00142520221053
Search in Google Scholar Back to article
[15] Nasimento G.L.T., Seara L.M., Neves B.R.A., Mohallem N.D.S., Prog. Coll. Pol. Sci., 128 (2004), 227.10.1007/b97091
Search in Google Scholar Back to article
[16] Wojcieszak D., Mazur M., Indyka J., Jurkowska A., Kalisz M., Domanowski P., Kaczmarek D., Domaradzki J., Mater. Sci-Poland, 33 (3) (2015), 660.10.1515/msp-2015-0084
Search in Google Scholar Back to article
[17] Domaradzki J., Kaczmarek D., Prociow E.L., Borkowska A., Kudrawiec R., Misiewicz J., Schmeisser D., Beuckert G., Surf. Coat. Tech., 200 (2006), 6283.10.1016/j.surfcoat.2005.11.055
Search in Google Scholar Back to article
[18] Twu M.J., Chiou A.H., Hu C.C., Hsu C.Y., Kuo C.G., Polym. Degrad. Stabil., 117 (2015), 1.10.1016/j.polymdegradstab.2015.03.010
Search in Google Scholar Back to article
[19] Choi K.H., Duraisamy N., Muhammad N.M., Kim I., Choi H., Jo J., Appl. Phys. A, 107 (2012), 715.10.1007/s00339-012-6782-0
Search in Google Scholar Back to article
[20] Mazur M., Wojcieszak D., Kaczmarek D., Domaradzki J., Zatryb G., Misiewicz J., Morgiel J., Opt. Mater., 42 (2015), 423.10.1016/j.optmat.2015.01.040
Search in Google Scholar Back to article
[21] Jouanny I., Labdi S., Aubert P., Buscema C., Maciejak O., Berger M.H., Guipont V., Jeandin M., Thin Solid Films, 518 (2010), 3212.10.1016/j.tsf.2009.09.046
Search in Google Scholar Back to article
[22] Zywitzki O., Modes T., Sahm H., Frach P., Goedicke K., Glos D., Surf. Coat. Tech., 180 – 181 (2004), 538.10.1016/j.surfcoat.2003.10.115
Search in Google Scholar Back to article
[23] Bendavid A., Martin P.J., Takikawa H., Thin Solid Films, 360 (2000), 241.10.1016/S0040-6090(99)00937-2
Search in Google Scholar Back to article
[24] Suda Y., Kawasaki H., Ueda T., Ohshima T., Thin Solid Films, 453 – 454 (2004), 162.10.1016/j.tsf.2003.11.185
Search in Google Scholar Back to article
[25] Klug H.P., Alexander E.E., X-ray diffraction procedures for polycrystalline and amorphous materials, 2^nd ed., John Wiley and Sons, New York, 1974.
Search in Google Scholar Back to article
[26] Mansfeld F., Electrochemical Methods of Corrosion Testing, in CRAMER S.D., COVINO B.S. JR. (Eds.), Corrosion: Fundamentals, Testing, and Protection, Vol. 13A. ASM Handbook, ASM International, 2003, pp. 446 – 462.10.31399/asm.hb.v13a.a0003644
Search in Google Scholar Back to article
[27] Oliver W.C., Pharr G.M., J. Mater. Res., 7 (1992), 1564.10.1557/JMR.1992.1564
Search in Google Scholar Back to article
[28] Jung Y.-G., Lawn B.R., Martyniuk M., Huang H., Hu X.Z., J. Mater. Res., 19 (2004), 3076.10.1557/JMR.2004.0380
Open DOI Search in Google Scholar Back to article
[29] Domaradzki J., Kaczmarek D., Prociow E., Wojcieszak D., Sieradzka K., Mazur M., Opt. Appl., 39 (4) (2009), 815.
Search in Google Scholar Back to article
[30] Wojcieszak D., Mazur M., Kaczmarek D., Morgiel J., Zatryb G., Domaradzki J., Misiewicz J., Opt. Mater., 48 (2015), 172.10.1016/j.optmat.2015.07.040
Search in Google Scholar Back to article
[31] Mazur M., Wojcieszak D., Domaradzki J., Kaczmarek D., Poniedziałek A., Domanowski P., Mater. Res. Bull., 72 (2015), 116.10.1016/j.materresbull.2015.07.011
Search in Google Scholar Back to article
[32] Powder Diffraction File, Joint Committee on Powder Diffraction Standards, ASTM, Philadelphia, PA, Card 21-1272 – PDF.
Search in Google Scholar Back to article
[33] Alhomoudi I.A., Newaz G., Thin Solid Films, 517 (2009), 4372.10.1016/j.tsf.2009.02.141
Search in Google Scholar Back to article
[34] Mazur M., Opt. Mater., 69 (2017), 96.10.1016/j.optmat.2017.04.021
Search in Google Scholar Back to article
[35] Tauc J., Optical Properties of Solids, Amsterdam, North Holland, 1970.
Search in Google Scholar Back to article
[36] Wicher B., Chodun R., Nowakowska-Langier K., Okrasa S., Trzciński M., Król K., Minikayev R., Skowroński Ł., KurpaskaŁ., Zdunek K., Appl. Surf. Sci., 456 (2018), 789.10.1016/j.apsusc.2018.06.179
Search in Google Scholar Back to article
[37] Billard A., Frantz C., Surf. Coat. Tech., 86 – 87 (1996), 722.10.1016/S0257-8972(96)03064-2
Search in Google Scholar Back to article
[38] Jung S.K., Lee S.H., Lee Y.S., Lee S.M., Park L.S., Sohn S.H., Mol. Cryst. Liq. Cryst., 499 (2009), 316.10.1080/15421400802619719
Search in Google Scholar Back to article
[39] Kittel C., Solid State Physics, John Wiley & Sons, New York, 1971.
Search in Google Scholar Back to article
[40] Heitmann W., Thin Solid Films, 5 (1970), 61.10.1016/0040-6090(70)90052-0
Search in Google Scholar Back to article
[41] Kermadi S., Agoudjil N., Sali S., Zougar L., Boumaour M., Broch L., Naciri A., Placido F., Spectrochim. Acta A, 145 (2015), 145.10.1016/j.saa.2015.02.11025770938
Search in Google Scholar Back to article
[42] Subramanian M., Vijayalakshmi S., Venkataraj S., Jayavel R., Thin Solid Films, 516 (2008), 3776.10.1016/j.tsf.2007.06.125
Search in Google Scholar Back to article
[43] Dave V., Dubey P., Gupta H.O., Chandra R., Thin Solid Films, 549 (2013), 2.10.1016/j.tsf.2013.07.016
Search in Google Scholar Back to article
[44] Bauer G., Ann. Phys.-Berlin, 411 (4) (1934), 434.10.1002/andp.19344110405
Search in Google Scholar Back to article
[45] Mazur M., Howind T., Gibson D., Kaczmarek D., Song S., Wojcieszak D., Zhu W., Mazur P., Domaradzki J., Placido F., Mater. Design, 85 (2015), 377.10.1016/j.matdes.2015.07.005
Search in Google Scholar Back to article
[46] Chang L.C., Chang C.Y., Chen Y.I., Surf. Coat. Tech., 280 (2015), 27.10.1016/j.surfcoat.2015.08.051
Search in Google Scholar Back to article
[47] Tsui T.Y., Pharr G.M., Oliver W.C., Bhatia C.S., White R.L., Anders S., Anders A., Brown I.G., Mat. Res. Soc. Symp. Proc., 383 (1995), 447.10.1557/PROC-383-447
Search in Google Scholar Back to article
[48] Sergueeva A.V., Stolyarov V.V., Valiev R.Z., Mukherjee A.K., Scripta Mater., 45 (2001), 747.10.1016/S1359-6462(01)01089-2
Open DOI Search in Google Scholar Back to article
[49] Wang Y.M., Ott R.T., Buuren T.V., Willey T.M., Biener M.M., Hamza A.V., Phys. Rev. B, 85 (2012), 014101.10.1103/PhysRevB.85.014101
Search in Google Scholar Back to article
[50] Lin J., Wang B., Sproul W.D., Ou Y., Dahan I., J. Phys. D Appl. Phys., 46 (2013), 084008.10.1088/0022-3727/46/8/084008
Search in Google Scholar Back to article
[51] Chuang L.C., Luo C.H., Yang S., Appl. Surf. Sci., 258 (2011), 297.10.1016/j.apsusc.2011.08.055
Search in Google Scholar Back to article
[52] Duyar O., Placido F., Durusoy H.Z., J. Phys. D Appl. Phys., 41 (2008), 095307.10.1088/0022-3727/41/9/095307
Search in Google Scholar Back to article
[53] Schmidt-Stein F., Thiemann S., Berger S., Hahn R., Schmuki P., Acta Mater., 58 (2010), 6317.10.1016/j.actamat.2010.07.053
Search in Google Scholar Back to article
[54] Mayo M.J., Siegel R.W., Narayanasamy A., Nix W.D., J. Mater. Res., 5 (5) (1990), 1073.10.1557/JMR.1990.1073
Search in Google Scholar Back to article

Influence of magnetron powering mode on various properties of TiO2 thin films

Abstract

Paradigm

My account