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Optical properties of AlN layers obtained by magnetron sputtering Cover

Optical properties of AlN layers obtained by magnetron sputtering

Materials Science-Poland
Volume 36 (2018): Issue 4 (December 2018)
By: ,   and    
Open Access
|Feb 2019
References

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DOI: https://doi.org/10.2478/msp-2018-0087 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 717 - 721
Submitted on: Dec 29, 2017
Accepted on: Mar 22, 2018
Published on: Feb 1, 2019
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
optical properties,
thin films,
AlN
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2019 Piotr Potera, Grzegorz Wisz, Łukasz Szyller, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Volume 36 (2018): Issue 4 (December 2018)
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