Optical properties of AlN layers obtained by magnetron sputtering

Piotr Potera; Grzegorz Wisz; Łukasz Szyller

doi:10.2478/msp-2018-0087

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Optical properties of AlN layers obtained by magnetron sputtering

Materials Science-Poland

Volume 36 (2018): Issue 4 (December 2018)

By: Piotr Potera, Grzegorz Wisz and Łukasz Szyller

Open Access

|Feb 2019

Abstract

The growth of AlN layers on glass substrates using magnetron sputtering method was performed and the grown layers were subjected to optical measurements. Transmission spectra of the layers grown at different content of N₂ in the atmosphere were obtained. The transmission spectra as well as energy gap depended on N₂ content. The annealing of the layers in air led to transmission changes and influenced energy gap and refractive index values.

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Articles in this issue

DOI: https://doi.org/10.2478/msp-2018-0087 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331

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Language: English

Page range: 717 - 721

Submitted on: Dec 29, 2017

Accepted on: Mar 22, 2018

Published on: Feb 1, 2019

Published by: Wroclaw University of Science and Technology

In partnership with: Paradigm Publishing Services

Publication frequency: 4 issues per year

Keywords:

Related subjects:

Materials sciences, other,

Nanomaterials,

Functional and smart materials,

Materials characterization and properties

© 2019 Piotr Potera, Grzegorz Wisz, Łukasz Szyller, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Volume 36 (2018): Issue 4 (December 2018)