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Optical properties of AlN layers obtained by magnetron sputtering Cover

Optical properties of AlN layers obtained by magnetron sputtering

Materials Science-Poland
Volume 36 (2018): Issue 4 (December 2018)
By: ,   and    
Open Access
|Feb 2019
Authors

Authors

Piotr Potera

ppotera@univ.rzeszow.pl

Faculty of Mathematics and Natural Sciences, University of Rzeszow, Rzeszow, Poland

Grzegorz Wisz

Faculty of Mathematics and Natural Sciences, University of Rzeszow, Rzeszow, Poland

Łukasz Szyller

Faculty of Mathematics and Natural Sciences, University of Rzeszow, Rzeszow, Poland
DOI: https://doi.org/10.2478/msp-2018-0087 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 717 - 721
Submitted on: Dec 29, 2017
Accepted on: Mar 22, 2018
Published on: Feb 1, 2019
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
optical properties,
thin films,
AlN
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2019 Piotr Potera, Grzegorz Wisz, Łukasz Szyller, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Volume 36 (2018): Issue 4 (December 2018)
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