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Cleaning of tungsten tips for subsequent use as cold field emitters or STM probes Cover

Cleaning of tungsten tips for subsequent use as cold field emitters or STM probes

Open Access
|Feb 2024

References

  1. G. N. Fursey, “Field emission in vacuum microelectronics,” Appl. Surf. Sci., vol. 215, no. 1-4, pp. 113-134, Jun. 2003, doi: 10.1016/S0169-4332(03)00315-5.
  2. J. Ishikawa et al., “Influence of cathode material on emission characteristics of field emitters for microelectronics devices,” J. Vac. Sci. Technol. B Microelectron. Nanom. Struct. Process. Meas. Phenom., vol. 11, no. 2, pp. 403-406, Mar. 1993, doi: 10.1116/1.586870.
  3. Z. Knor, S. Biehl, J. Plšek, L. Dvořák, and C. Edelmann, “A contribution to the search for a stable field emission electron source based on W-WOx-Au and W-Al2O3-Au systems,” Vacuum, vol. 51, no. 1, pp. 11-19, Sep. 1998, doi: 10.1016/S0042-207X(98)00128-6.
  4. B. Li et al., “Fabricating ultra-sharp tungsten STM tips with high yield: double-electrolyte etching method and machine learning,” SN Appl. Sci., vol. 2, no. 7, pp. 1-13, Jul. 2020, doi: 10.1007/S42452-020-3017-4/FIGURES/13.
  5. M. Setvín et al., “Ultrasharp tungsten tips – characterization and nondestructive cleaning,” Ultramicroscopy, vol. 113, pp. 152-157, Feb. 2012, doi: 10.1016/J.ULTRAMIC.2011.10.005.
  6. V. V. Dremov, V. A. Makarenko, S. Y. Shapoval, O. V Trofimov V G Beshenkov, and I. Khodos, “Sharp and clean tungsten tips for STM investigations,” Nanobiology, vol. 3, pp. 83-88, 1994, http://purple.iptm.ru/epilab/states/Nanobiology(1994)3, 83-88.pdf
  7. E. Paparazzo, L. Moretto, S. Selci, M. Righini, and I. Farné, “Effects of HF attack on the surface and interface microchemistry of W tips for use in the STM microscope: a scanning Auger microscopy (SAM) study,” Vacuum, vol. 52, no. 4, pp. 421-426, Apr. 1999, doi: 10.1016/S0042-207X(98)00325-X.
  8. A. Knápek, J. Sýkora, J. Chlumská, and D. Sobola, “Programmable set-up for electrochemical preparation of STM tips and ultra-sharp field emission cathodes,” Microelectron. Eng., vol. 173, pp. 42-47, Apr. 2017, doi: 10.1016/J.MEE.2017.04.002.
  9. A. J. Melmed, “The art and science and other aspects of making sharp tips,” J. Vac. Sci. Technol. B Microelectron. Nanom. Struct. Process. Meas. Phenom., vol. 9, no. 2, pp. 601-608, Mar. 1991, doi: 10.1116/1.585467.
  10. L. R. Hossner, “Dissolution for Total Elemental Analysis,” Methods Soil Anal. Part 3 Chem. Methods, pp. 49-64, Jan. 2018, doi: 10.2136/SSSABOOKSER5.3.C3.
  11. F. Seel, “The Chemistry of Nitrous Acid and of its Derivatives in Liquid Hydrogen Fluoride,” Angew. Chemie Int. Ed. English, vol. 4, no. 8, pp. 635-641, Aug. 1965, doi: 10.1002/ANIE.196506351.
  12. M. J. Fedoruk, R. Bronstein, and B. D. Kerger, “Ammonia exposure and hazard assessment for selected household cleaning product uses,” J. Expo. Sci. Environ. Epidemiol. 2005 156, vol. 15, no. 6, pp. 534-544, Jul. 2005, doi: 10.1038/sj.jea.7500431.
  13. E. Llobet et al., “Fabrication of Highly Selective Tungsten Oxide Ammonia Sensors,” J. Electrochem. Soc., vol. 147, no. 2, p. 776, Feb. 2000, doi: 10.1149/1.1393270/XML.
DOI: https://doi.org/10.2478/jee-2024-0006 | Journal eISSN: 1339-309X | Journal ISSN: 1335-3632
Language: English
Page range: 41 - 46
Submitted on: Dec 5, 2023
Published on: Feb 10, 2024
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year

© 2024 Zuzana Košelová, Lenka Horáková, Daniel Burda, Mohammad M. Allaham, Alexandr Knápek, Zdenka Fohlerová, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.