Functional nano-structuring of thin silicon nitride membranes
DOI: https://doi.org/10.2478/jee-2020-0019 | Journal eISSN: 1339-309X (formerly 1335-3632) | Journal ISSN: 1335-3632
Language: English
Page range: 127 - 130
Submitted on: Dec 19, 2019
Published on: May 13, 2020
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
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© 2020 Milan Matějka, Stanislav Krátký, Tomáš Řiháček, Alexandr Knápek, Vladimír Kolařík, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.