Functional nano-structuring of thin silicon nitride membranes
Authors
Stanislav Krátký
Institute of Scientific Instruments of the CAS, Brno
Tomáš Řiháček
Institute of Scientific Instruments of the CAS, Brno
Alexandr Knápek
Institute of Scientific Instruments of the CAS, Brno
Vladimír Kolařík
Institute of Scientific Instruments of the CAS, Brno
Language: English
Page range: 127 - 130
Submitted on: Dec 19, 2019
Published on: May 13, 2020
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
Keywords:
Related subjects:
© 2020 Milan Matějka, Stanislav Krátký, Tomáš Řiháček, Alexandr Knápek, Vladimír Kolařík, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.