Black silicon – correlation between microstructure and Raman scattering

Jurečka, Stanislav; Pinčík, Emil; Imamura, Kentaro; Matsumoto, Taketoshi; Kobayashi, Hikaru

doi:10.2478/jee-2019-0042

Abstract

Black silicon layers were formed on silicon substrate by the surface structure chemical transfer method and by anodic etching method. Properties of microstructure of formed layers were experimentally studied by the electron microscopy methods (TEM) and characterized by statistical, Fourier and multifractal methods. Theoretical structures with defined fractal properties and surface roughness were generated and their microstructure properties were evaluated. Obtained results were used for the explanation of the real structure development during the forming procedure. By using of this approach, we study the correlation of roughness and fractality with optical properties. Black silicon layers were also investigated by using of Raman scattering method. Optimized theoretical model describing the 1^st order of black Si Raman scattering profile was constructed and used for evaluation of the biaxial tensile stress introduced during etching procedure.

References

[1] S.-W. Chang, V. P. Chuang, S. T. Boles, C. A. Ross, and C. V. Thompson, “Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching”, Advanced Functional Materials, vol. 19, pp. 2495–2500, 2009.10.1002/adfm.200900181
Search in Google Scholar Back to article
[2] M. L. Zhang, K. Q. Peng, X. Fan, J. S. Jie, R. Q. Zhang, S. T. Lee, and N. B. Wong, “Preparation of Large-Area Uniform Silicon Nanowires Arrays through Metal-Assisted Chemical Etching”, J. Phys. Chem. C, vol. 112, pp. 4444–4450, 2008.10.1021/jp077053o
Search in Google Scholar Back to article
[3] X. Li, Y. Xiao, C. Yan, K. Zhou, S. L. Schweizer, A. Sprafke, J.-H. Lee, and R. B. Wehrspohn, “Influence of the mobility of Pt nanoparticles on the anisotropic etching properties of silicon”, ECS Solid State Lett., vol. 2, pp. 22–24, 2013.10.1149/2.010302ssl
Search in Google Scholar Back to article
[4] H. Chen, H. Wang, X.-H. Zhang, C.-S. Lee, and S.-T. Lee, “Wafer-Scale Synthesis of Single-Crystal Zigzag Silicon Nano-wire Arrays with Controlled Turning Angles”, Nano letters, vol. 10, pp. 864–868, 2010.10.1021/nl903391x20104856
Search in Google Scholar Back to article
[5] O. J. Hildreth, A. G. Fedorov, and C. P. Wong, “3D spirals with controlled chirality fabricated using metal-assisted chemical etching of silicon”, ACS Nano, vol. 6, pp. 10004–10012, 2012.10.1021/nn303680k
Search in Google Scholar Back to article
[6] L. T., Canham, “Silicon Quantum Wire Array Fabrication by Electrochemical and Chemical Dissolution of Wafers”, Applied Physics Letters, vol. 57, pp. 1046–1048, 1990.10.1063/1.103561
Search in Google Scholar Back to article
[7] V. Lehmann, and U. Gösele, “Porous silicon formation: A quantum wire effect”, Applied Physics Letters, vol. 58, pp. 856–858, 1991.10.1063/1.104512
Search in Google Scholar Back to article
[8] K. Imamura, T. Nonaka, D. Irishika and H. Kobayashi, Ecs Solid State Lett., vol. 4, pp. Q63–Q65, 2015.10.1149/2.0091512ssl
Search in Google Scholar Back to article
[9] D. Irishika, K. Imamura and H. Kobayashi, Sol. Energ. Mat. Sol. Cells, vol. 141, 2015.10.1016/j.solmat.2015.05.006
Search in Google Scholar Back to article
[10] K. Imamura, D. Irishika, and H. Kobayashi, Prog. Photovolt. Res. Appl., vol. 25, pp. 358–366, 2017.10.1002/pip.2867
Search in Google Scholar Back to article
[11] K. Imamura, F. C. Franco Jr., T. Matsumoto, H. Kobayashi, Appl. Phys. Lett., vol. 103, pp. 013110, 2013.10.1063/1.4813089
Search in Google Scholar Back to article
[12] B. B. Mandelbrot, The Fractal Geometry of Nature, Freeman: New York, USA, 1983.10.1119/1.13295
Search in Google Scholar Back to article
[13] K. Falconer, Fractal Geometry, Wiley: Chichester, UK, 1989.
Search in Google Scholar Back to article
[14] G. Franceschetti, D. Riccio, Scattering, Natural Surfaces and Fractals, Academic Press: Burlington, USA, 2007.10.1016/B978-012265655-2/50000-3
Search in Google Scholar Back to article
[15] A. Chhabra, R. V. Jensen, Phys. Rew. A, vol. 40, pp. 5284–5294, 1989.10.1103/PhysRevA.40.5284
Search in Google Scholar Back to article
[16] E. A. F. Ihlen, B. Vereijken, “Interaction dominant dynamics in human cognition: beyond 1/f fluctuations”, J. Exp. Psychol. Gen., vol. 139, pp. 436–463, 2010.10.1037/a001909820677894
Search in Google Scholar Back to article
[17] American Standard ASME B46.1 for Surface Texture, 1995.
Search in Google Scholar Back to article
[18] J. Schmahling, F. A. Hamprecht, “Generalizing the Abbott-Firestone curve by two new surface descriptors”, Wear, vol. 262, pp. 1360–1371, 2007.10.1016/j.wear.2007.01.025
Search in Google Scholar Back to article
[19] W. Smith, Handbook of Real-Time Fast Fourier Transforms: Algorithms to Product Testing, Wiley, IEEE Press, 1995.10.1109/9780470544792
Search in Google Scholar Back to article
[20] V. Jain, M. C. Biesinger, M. R. Linford, “The Gaussian-Lorentzian Sum, Product, and Convolution (Voigt) functions in the context of peak fitting X-ray photoelectron spectroscopy (XPS) narrow scans”, Applied Surface Science, vol. 447, pp. 548–553, 2018.10.1016/j.apsusc.2018.03.190
Search in Google Scholar Back to article
[21] P. Pelikán, M. Čeppan, M. Liška, Applications of Numerical Methods in Molecular Spectroscopy, CRC Press, Boca Raton, 1993.
Search in Google Scholar Back to article
[22] S. Jurečka, “Theoretical Model of the Physical System: Optimization by the Genetic Algorithm”, In: Ioannis Dritsas Stochastic Optimization - Seeing the Optimal for the Uncertain, InTech, Vienna, 2011.10.5772/14860
Search in Google Scholar Back to article
[23] S. Jurečka, E. Pinčík, R., Brunner, “Solution of the optical parameters of the thin film systems and interfaces”, Applied Surface Science, vol. 254, pp. 3672–3676, 2008.10.1016/j.apsusc.2007.10.076
Search in Google Scholar Back to article
[24] L. S. Lasdon, A. D. Waren, A. Jain, M. Ratner, “Design and Testing of a Generalized Reduced Gradient Code for Nonlinear Programming”, ACM Transactions on Mathematical Software, vol. 4, no. 1, pp. 34–50, 1978.10.1145/355769.355773
Search in Google Scholar Back to article

Black silicon – correlation between microstructure and Raman scattering

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