Far Field Measurements of Phc Led Prepared by E–Beam Lithography

Pavol Hronec; Jaroslava Škriniarová; Anna Benčurová; Pavol Nemec; Dušan Pudiš; Jaroslav Kováč

doi:10.2478/jee-2014-0050

Abstract

The paper deals with optical characterization of the Al0.295Ga0.705As/GaAs multi-quantum well light emitting diode (LED) structure with photonic crystal (2D PhC) patterned on the top of the structure using Electron Beam Direct Write Lithography (EBDWL). Light-current characteristics measured by integrating sphere shows increase of extracted light intensity as 21.1%. Additionally, extracted light intensity was studied by far-field measurements as a complementary method to light-current characteristics. The far-field measurements show increase of extracted light intensity as 31.2%. We suggest this method as more suitable for evaluation of extracted light intensity because it omits emission from edges of the LED and thus light is measured only from the area where PhC is patterned

References

[1] PUDIŠ, D.-ˇ SUˇ SLIK, L’.-KUBICOV´A, I.-ˇ SKRINIAROV´A, J.-MARTINˇCEK, I. : Advanced Optical Methods for Patterning of Photonic Structures in Photoresist, III-V Semiconductors and PMMA, Proc. of SPIE 7746 (2010), 774616-1-6.10.1117/12.881702
Search in Google Scholar
[2] KUBICOVÁ, I.-PUDIˇ S, D.-ˇ SUˇ SLIK, L’.-ˇ SKRINIAROV´A, J.-SLABEYCIUSOV´A, S.-MARTINˇCEK, I. : Structures Patterning by Non-Contact NSOM Lithographyjour Proc. of SPIE.
Search in Google Scholar
[3] HRONEC, P.-KOV´A ˇC , J.-ˇ SKRINIAROV´A, J. : Investigation of the LED with PhC Prepared by e-Beam Lithography, Proc. of ADEPT (2014), 27-30.
Search in Google Scholar
[4] CHUN-FENG, L.-JIM-YONG, C.-HAO-CHUNG, K.-HSIHSUAN, Y.-CHIA-EN, L.-CHIA-HSIN, C.-WEN-YUNG, Y.-TIEN-CHANG, L. : Far-Field and Near-Field Distribution of GaN-Based Photonic Crystal LEDs with Guided Mode Extraction, IEEE Journal of Selected Topics in Quantum Electronics 15 No. 4 (2009), 1234-1241.10.1109/JSTQE.2009.2015582
Search in Google Scholar
[5] CHUN-FENG, L.-JIM-YONG, C.-HAO-CHUNG, K.-HSIHSUAN, Y.-CHIA-EN, L.-CHIA-HSIN, C.-HAN-TSUNG, H.-WEN-YUNG, Y. : Far-Field of GaN Film-Transferred Green Light-Emitting Diodes with Two Dimensional Photonic Crystals, Optics ExprESS 17 No. 11 (2009).
Search in Google Scholar
[6] BOOKSTEIN, F. L. : Principal Warps: Thin-Plate Splines and the Decomposition of Deformations, IEEE Transactions on Pattern Analysis andMachine Intelligence 11 No. 6 (1989), 567-585.10.1109/34.24792
Search in Google Scholar
[7] ALMAN, G. M.-MOLTER, L. A.-SHEN, H.-DUTTA, M. : Refractive Index Approximations from Linear Perturbation Theory for Planar MQW Waveguides, IEEE Journal of Quantum Electronics 28 No. 3 (1992), 650-657.10.1109/3.124989
Search in Google Scholar
[8] SAINI, M.-SHARMA, E. K. : Equivalent Refractive Index of MQW Waveguides, IEEE Journal of Quantum Electronics 32 No. 8 (1996), 1383-1390.10.1109/3.511551
Search in Google Scholar
[9] SONEK, G. J.-BALLANTYNE, J. M.-CHEN, Y. J.-CARTER, G. M.-BROWN, S. W.-KOTELES, E. S.-SALERNO, J. P. : Dielectric Properties of GaAs/AlGaAs Multiple Quantum Well Waveguides, IEEE Journal of Quantum Electronics 22 No. 7 (1986), 1015-1018.10.1109/JQE.1986.1073076
Search in Google Scholar
[10] HRONEC, P.-KOV´A ˇC , J. : Guided Mode Light Extraction from LED Structure Using Photonic Crystals, Proc. of 14th Conference of Doctoral Students ELITECH’ 12 Bratislava, Slovak Republic.
Search in Google Scholar

Far Field Measurements of Phc Led Prepared by E–Beam Lithography

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