Annealing Effect on the Structural and Optical properties of SiOx films deposited by HFCVD: Features for its possible use as Optical Sensor
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DOI: https://doi.org/10.21307/ijssis-2019-122 | Journal eISSN: 1178-5608
Language: English
Page range: 1 - 6
Published online: Feb 15, 2020
Published in print: Jan 1, 2014
Published by: International Journal on Smart Sensing and Intelligent Systems
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
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© 2020 J. A. Luna López, A. Benítez Lara, G. García Salgado, D. Hernández de la Luz, M. Pacio, A. Morales Sanchez, S. A. Perez Garcia, published by International Journal on Smart Sensing and Intelligent Systems
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