Annealing Effect on the Structural and Optical properties of SiOx films deposited by HFCVD: Features for its possible use as Optical Sensor Cover

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Annealing Effect on the Structural and Optical properties of SiOx films deposited by HFCVD: Features for its possible use as Optical Sensor

International Journal on Smart Sensing and Intelligent Systems

Volume 7 (2014): Issue 5 (January 2014)

By: J. A. Luna López, A. Benítez Lara, G. García Salgado, D. Hernández de la Luz, M. Pacio, A. Morales Sanchez and S. A. Perez Garcia

Open Access

|Feb 2020

Authors

J. A. Luna López

jose.luna@correo.buap.mx

Science Institute-ICUAP-CIDS-BUAP Puebla, Pue., 72571, México

A. Benítez Lara

Science Institute-ICUAP-CIDS-BUAP Puebla, Pue., 72571, México

G. García Salgado

Science Institute-ICUAP-CIDS-BUAP Puebla, Pue., 72571, México

D. Hernández de la Luz

Science Institute-ICUAP-CIDS-BUAP Puebla, Pue., 72571, México

M. Pacio

Science Institute-ICUAP-CIDS-BUAP Puebla, Pue., 72571, México

A. Morales Sanchez

Centro de Investigación en Materiales Avanzados S. C, CIMAV-Unidad Monterrey-PIIT, Apodaca, Nuevo León, México

S. A. Perez Garcia

alfredo.morales@cimav.edu.mx

Centro de Investigación en Materiales Avanzados S. C, CIMAV-Unidad Monterrey-PIIT, Apodaca, Nuevo León, México

DOI: https://doi.org/10.21307/ijssis-2019-122 | Journal eISSN: 1178-5608

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Language: English

Page range: 1 - 6

Published on: Feb 15, 2020

Published by: Professor Subhas Chandra Mukhopadhyay

In partnership with: Paradigm Publishing Services

Publication frequency: 1 issue per year

Keywords:

photoluminiscence,

UV/Vis spectroscopy

Related subjects:

Introductions and overviews,

Engineering, other

© 2020 J. A. Luna López, A. Benítez Lara, G. García Salgado, D. Hernández de la Luz, M. Pacio, A. Morales Sanchez, S. A. Perez Garcia, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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