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Microstructuring of SU-8 Resist for MEMS and Bio-Applications

International Journal on Smart Sensing and Intelligent Systems
Volume 3 (2010): Issue 1 (January 2010)
By:
Open Access
|Dec 2017
DOI: https://doi.org/10.21307/ijssis-2017-384 | Journal eISSN: 1178-5608
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Language: English
Page range: 118 - 129
Published on: Dec 13, 2017
Published by: Professor Subhas Chandra Mukhopadhyay
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2017 P.K. Dey, B. Pramanick, A. RaviShankar, P. Ganguly, S. Das, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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