Microstructuring of SU-8 Resist for MEMS and Bio-Applications
Abstract
Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structure of the glass substrate. Micro-channel was fabricated by molding of PDMS polymer on patterned SU-8 ridge structure. Structural characterization of the fabricated structures were investigated using optical microscope and SEM.
© 2017 P.K. Dey, B. Pramanick, A. RaviShankar, P. Ganguly, S. Das, published by Professor Subhas Chandra Mukhopadhyay
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