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Microstructuring of SU-8 Resist for MEMS and Bio-Applications Cover

Microstructuring of SU-8 Resist for MEMS and Bio-Applications

International Journal on Smart Sensing and Intelligent Systems
Volume 3 (2010): Issue 1 (January 2010)
By: P.K. Dey,  B. Pramanick,  A. RaviShankar,  P. Ganguly and  S. Das  
Open Access
|Dec 2017

Authors

P.K. Dey

pkd@ece.iitkgp.ernet.in

Advanced Technology Centre Development, Indian Institute of Technology, Kharagpur, India

B. Pramanick

Advanced Technology Centre Development, Indian Institute of Technology, Kharagpur, India

A. RaviShankar

Department of Electronics and Communication Engineering, School of Electrical Sciences, Karunya University, Coimbatore, India

P. Ganguly

Advanced Technology Centre Development, Indian Institute of Technology, Kharagpur, India

S. Das

School of Medical Science and Technology Indian Institute of Technology, Kharagpur, India
DOI: https://doi.org/10.21307/ijssis-2017-384 | Journal eISSN: 1178-5608
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Language: English
Page range: 118 - 129
Published on: Dec 13, 2017
Published by: Professor Subhas Chandra Mukhopadhyay
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2017 P.K. Dey, B. Pramanick, A. RaviShankar, P. Ganguly, S. Das, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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