Microstructuring of SU-8 Resist for MEMS and Bio-Applications
By:
Authors
P.K. Dey
Advanced Technology Centre Development, Indian Institute of Technology, Kharagpur, India
B. Pramanick
Advanced Technology Centre Development, Indian Institute of Technology, Kharagpur, India
A. RaviShankar
Department of Electronics and Communication Engineering, School of Electrical Sciences, Karunya University, Coimbatore, India
P. Ganguly
Advanced Technology Centre Development, Indian Institute of Technology, Kharagpur, India
S. Das
School of Medical Science and Technology Indian Institute of Technology, Kharagpur, India
DOI: https://doi.org/10.21307/ijssis-2017-384 | Journal eISSN: 1178-5608
Language: English
Page range: 118 - 129
Published on: Dec 13, 2017
Published by: Professor Subhas Chandra Mukhopadhyay
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Related subjects:
© 2017 P.K. Dey, B. Pramanick, A. RaviShankar, P. Ganguly, S. Das, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.