Hydrogen Gas Sensing Performance Of Pt/Sno2 Nanowires/Sic Mos Devices

M. Shafiei; K. Kalantar-zadeh; W. Wlodarski; E. Comini; M. Ferroni; G. Sberveglieri; S. Kaciulis; L. Pandolfi

doi:10.21307/ijssis-2017-319

.blurhash-client-img { display: none !important; }

Hydrogen Gas Sensing Performance Of Pt/Sno2 Nanowires/Sic Mos Devices

International Journal on Smart Sensing and Intelligent Systems

Volume 1 (2008): Issue 3 (January 2008)

By: M. Shafiei, K. Kalantar-zadeh, W. Wlodarski, E. Comini, M. Ferroni, G. Sberveglieri, S. Kaciulis and L. Pandolfi

Open Access

|Dec 2017

Abstract

This paper presents material and gas sensing properties of Pt/SnO2 nanowires/SiC metal oxide semiconductor devices towards hydrogen. The SnO2 nanowires were deposited onto the SiC substrates by vapor-liquid-solid growth mechanism. The material properties of the sensors were investigated using scanning electron microscopy, transmission electron microscopy and X-ray photoelectron spectroscopy. The current-voltage characteristics have been analyzed. The effective change in the barrier height for 1% hydrogen was found to be 142.91 meV. The dynamic response of the sensors towards hydrogen at different temperatures has also been studied. At 530°C, voltage shift of 310 mV for 1% hydrogen was observed

References

1N. Yamazoe, “New approaches for improving semiconductors gas sensors “ in Proc. 3rd International Meeting on Chemical Sensors, Cleveland, OH, U.S.A., 1990, pp. 3-8.
Search in Google Scholar Back to article
2N. Yamazoe, “New approaches for improving semiconductor gas sensors,” Sensors and Actuators B: Chemical, vol. 5, pp. 7-19, 1991.10.1016/0925-4005(91)80213-4
Search in Google Scholar Back to article
3N. Barsan, M. Schweizer-Berberich, and W. Gopel, Fresenius Journal of Analytical Chemistry, vol. 365, pp. 287-304, 1999.10.1007/s002160051490
Search in Google Scholar Back to article
4E. Comini, “Metal oxide nano-crystals for gas sensing,” Analytica Chimica Acta, vol. 568, pp. 28-40, 2006.10.1016/j.aca.2005.10.069
Search in Google Scholar Back to article
5K. Kalantar-zadeh and F. Benjamin, Nanotechnology-Enabled Sensors. Springer, 2008.10.1007/978-0-387-68023-1
Search in Google Scholar Back to article
6A. Z. Sadek, S. Choopun, W. Wlodarski, S. J. Ippolito, and K. Kalantar-zadeh, “Characterization of ZnO nanobelt-based gas sensor for H2, NO2, and hydrocarbon sensing,” IEEE Sensors Journal, vol. 7, pp. 919-924, 2007.10.1109/JSEN.2007.895963
Search in Google Scholar Back to article
7E. Comini, G. Faglia, G. Sberveglieri, Z. Pan, and Z. L. Wang, “Stable and highly sensitive gas sensors based on semiconductiong oxide nanobelts,” Appl. Phys. Lett, vol. 81, pp. 18691871, 2002.
Search in Google Scholar Back to article
8D. Zhang, Z. Liu, C. Li, T. Tang, X. Liu, S. Han, B. Lei, and C. Zhou, “Detection of NO2 down to ppb levels using individual and multiple In2O3 nanowire devices,” NanoLetters, vol. 4, no. 10, pp. 1919-1924, 2004.
Search in Google Scholar Back to article
9K. M. Sawicka, A. K. Prasad, and P. I. Gouma, “Metal oxide nanowires for use in chemical sensing applications,” Sensor Letter, vol. 3, no. 1, pp. 1-5, 2005.10.1166/sl.2005.010
Search in Google Scholar Back to article
10H. Y. Dang, J. Wang, and S. S. Fan, “The synthesis of metal oxide nanowires by directly heating metal samples in appropriate oxygen atmospheres,” Nanotechnology, vol. 14, pp. 738741, 2003.
Search in Google Scholar Back to article
11A. L. Spetz, P. Tobias, A. Baranzahi, P. Martensson, and I. Lundstrom, “Current status of silicon carbide based high-temperature gas sensors,” IEEE T Electron Dev, vol. 46, pp. 561-566, 1999.10.1109/16.748877
Search in Google Scholar Back to article
12A. Arbab, A. Spetz, and I. Lundstrom, “Evaluation of Gas Mixtures with High-Temperature Gas Sensors Based on Silicon Carbide,” Sensors and Actuators B, vol. 18-19, pp. 562-565, 1994.10.1016/0925-4005(93)01085-I
Search in Google Scholar Back to article
13S. Kandasamy, A. Trinchi, W. Wlodarski, E. Comini, and G. Sberveglieri, “Study of Pt/TiO2/SiC schottky diode based gas sensor,” in Proc. IEEE Sensors Conf. 2004; vol. 2, pp. T2P-P.18, 2004.
Search in Google Scholar Back to article
14S. Kandasamy, W. wlodarski, A. Holland, S. Nakagomi, and Y. Kokubun, “Electrical characterization and hydrogen gas sensing properties of a n-ZnO/p-SiC Pt-gate metal semiconductor field effect transistor,” Applied Physics Letters, vol. 90, p. 064103, 2007.
Search in Google Scholar Back to article
15A. Trinchi, W. Wlodarski, and Y. X. Li, “Hydrogen sensitive Ga2O3 Schottky diode sensor based on SiC,” Sensors and Actuators B, vol. 100, pp. 94-98, 2004.10.1016/j.snb.2003.12.028
Search in Google Scholar Back to article
16S. Nakagomi, K. Okuda, and Y. Kokubun, “Electrical properties dependent on H2 gas for new structure diode of Pt-thin WO3-SiC,” Sensors and Actuators B: Chemical, vol. 96, pp. 364371, 2003.
Search in Google Scholar Back to article
17G. W. Hunter, P.G. Neudeck, M. Gray, D. Androjna, L-Y. Chen, R. W. Hoffman, C.C. Liu, and Q. H. Wu, “SiC-based gas sensor development,” Mater. Sci. Forum 338-342 (part 2), pp. 1439-1442, 2000.
Search in Google Scholar Back to article
18V. Demarne and R. Sanjine, “Thin film semiconducting metal oxide gas sensors,” Gas Sensors, edited by G. Sberveglieri (Kluwer Academic Publishers, Netherlans, 1992), pp. 89-116, Ch. 3.10.1007/978-94-011-2737-0_3
Search in Google Scholar Back to article
19U. Hoefer, J. Frank, and M. Fleischer, “High temperature Ga2O3-gas sensors and SnO2-gas sensors: a comparison,” Sensors and Actuators B: Chemical, vol. 78, pp. 6-11, 2001.10.1016/S0925-4005(01)00784-5
Search in Google Scholar Back to article
20M. Law, H. Kind, B. Messer, F. Kim, and P. Yang, “Photochemical sensing of NO2 with SnO2 nanoribbon nanosensors at room temperature,” Angew. Chem. Int. Ed, vol. 41, pp. 24052408, 2002.
Search in Google Scholar Back to article
21A. Kolmakov, Y. Zhang, G. Cheng, and M. Moskovits, “Detection of CO and O2 using tin oxide nanowire sensors,” Advanced Materials, vol. 15, pp. 997-1000, 2003.10.1002/adma.200304889
Search in Google Scholar Back to article
22F. Li, J. Xu, X. Yu, L. Chen, J. Zhu, Z. Yang, and X. Xin, “One-step solid-state reaction synthesis and gas sensing property of tin oxide nanoparticles,” Sensors and Actuators B: Chemical, vol. 81, pp. 165-169, 2002.10.1016/S0925-4005(01)00947-9
Search in Google Scholar Back to article
23G. Sberveglieri, C. Baratto, E. Comini, G. Faglia, M. Ferroni, A. Ponzoni, and A. Vomiero, “Synthesis and characterization of semiconducting nanowires for gas sensing,” Sensors and Actuators B: Ch.emical, vol. 121, pp. 208-213, 2007.10.1016/j.snb.2006.09.049
Search in Google Scholar Back to article
24S. Bianchi, E. Comini, M. Ferroni, G. Sberveglieri, L. Pandolfi, S. Kaciulis, W. Wlodarski, M. Shafiei, and S. Kandasamy, “Preparation and characterization of tin oxide nano;wires on SiC,” presented at the 14th Int. Conf. on Solid-State, Actuators and Microsystems, Lyon, France, June 2007.10.1109/SENSOR.2007.4300101
Search in Google Scholar Back to article
25V.M. Jiménez, J.A. Meíjas, J.P. Espinós, A.R. González-Elipe, “Interface effects for metal oxide films deposited on another metal oxide”, Surface Science, vol. 366, pp. 545-555, 1996.10.1016/0039-6028(96)00831-X
Search in Google Scholar Back to article
26V.M. Jiménez, J.P. Espinós, A.R. González-Elipe, “Interface effects for metal oxide films deposited on another metal oxide”, Surface Science, vol. 366, pp. 556-563, 1996.10.1016/0039-6028(96)00832-1
Search in Google Scholar Back to article
27S. Kaciulis, L. Pandolfi, S. Bianchi, E. Comini, G. Faglia, M. Ferroni, G. Sberveglieri, M. Shafiei, S. Kandasamy, and W. Wlodarski, “Nanowires of metal oxides for gas sensing applications,” Surf. Interface Anal., vol. 39, 2008, in press.10.1002/sia.2736
Search in Google Scholar Back to article
28I. Lundstrom, M. S. Shivaraman, and C. M. Svensson, “A hydrogen-sensitive Pd-gate MOS transistor,” J. Appl. Phys., vol. 46 (9), pp. 3876-3881, 1975.
Search in Google Scholar Back to article
29I. Lundstrom, M. Armgarth, and L. G. Petersson, “Physics with catalytic metal gate chemical sensors,” Crc Critical Reviews in Solid State and Materials Sciences, vol. 15, pp. 201-278, 1989.10.1080/10408438908243446
Search in Google Scholar Back to article
30S. Kandasamy, A. Trinchi, W. Wlodarski, E. Comini, and G. Sberveglieri, “Hydrogen and hydrocarbon gas sensing performance of Pt/WO3/SiC MROSiC devices,” Sensors and Actuators B: Chemical, vol. 111-112, pp. 111-116, 2005.10.1016/j.snb.2005.06.066
Search in Google Scholar Back to article
31S. M. Sze, Physics of Semiconductor Devices. 2nd ed, Wiley, New York, 1981.
Search in Google Scholar Back to article
32A. Trinchi, W. Wlodarski, Y. X. Li, G. Faglia, and G. Sberveglieri, “Pt/Ga2O3/SiC MRISiC devices: a study of the hydrogen response,” J. phys. D: Appl. Phys, vol. 38, pp. 754-763, 20010.1088/0022-3727/38/5/014
Search in Google Scholar Back to article

Articles in this issue

DOI: https://doi.org/10.21307/ijssis-2017-319 | Journal eISSN: 1178-5608

Journal RSS Feed

Language: English

Page range: 771 - 783

Published on: Dec 13, 2017

Published by: Macquarie University, Australia

In partnership with: Paradigm Publishing Services

Publication frequency: 1 issue per year

Keywords:

Gas sensor,

Hydrogen,

Nanowires,

SnO2,

MOS,

Schottky,

XPS,

TEM,

SEM

Related subjects:

Engineering,

Introductions and overviews,

Engineering, other

© 2017 M. Shafiei, K. Kalantar-zadeh, W. Wlodarski, E. Comini, M. Ferroni, G. Sberveglieri, S. Kaciulis, L. Pandolfi, published by Macquarie University, Australia
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Volume 1 (2008): Issue 3 (January 2008)