Design of Temperature Sensitive Structure for Micromechanical Silicon Resonant Accelerometer
By: Heng Li, Libin Huang, Qinqin Ran and Songli Wang
DOI: https://doi.org/10.21307/iccnea.2017.91 | Journal eISSN: 2470-8038
Language: English
Page range: 56 - 60
Published on: Apr 9, 2018
Published by: Xi’an Technological University
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
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© 2018 Heng Li, Libin Huang, Qinqin Ran, Songli Wang, published by Xi’an Technological University
This work is licensed under the Creative Commons Attribution 4.0 License.