Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices
By: Gaofa He, Jie Meng, Renbing Tan and Peng Zhong
DOI: https://doi.org/10.1515/msr-2018-0035 | Journal eISSN: 1335-8871
Language: English
Page range: 256 - 261
Submitted on: Jul 19, 2018
|Accepted on: Nov 5, 2018
|Published on: Nov 30, 2018
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
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© 2018 Gaofa He, Jie Meng, Renbing Tan, Peng Zhong, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.