Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices
By: Gaofa He, Jie Meng, Renbing Tan and Peng Zhong
Authors
Gaofa He
School of Mechanical and Power Engineering, Chongqing University of Science and Technology, Chongqing, China
Jie Meng
School of Mechanical and Power Engineering, Chongqing University of Science and Technology, Chongqing, China
Renbing Tan
School of Mathematics and Physics, Chongqing University of Science and Technology, Chongqing, China
Peng Zhong
School of Mechanical and Power Engineering, Chongqing University of Science and Technology, Chongqing, China
DOI: https://doi.org/10.1515/msr-2018-0035 | Journal eISSN: 1335-8871
Language: English
Page range: 256 - 261
Submitted on: Jul 19, 2018
Accepted on: Nov 5, 2018
Published on: Nov 30, 2018
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
Related subjects:
© 2018 Gaofa He, Jie Meng, Renbing Tan, Peng Zhong, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.