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Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices Cover

Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices

Measurement Science Review
Volume 18 (2018): Issue 6 (October 2018)
By: Gaofa He,  Jie Meng,  Renbing Tan and  Peng Zhong  
Open Access
|Nov 2018

Authors

Gaofa He

hegaofa@cqust.edu.cn

School of Mechanical and Power Engineering, Chongqing University of Science and Technology, Chongqing, China

Jie Meng

School of Mechanical and Power Engineering, Chongqing University of Science and Technology, Chongqing, China

Renbing Tan

School of Mathematics and Physics, Chongqing University of Science and Technology, Chongqing, China

Peng Zhong

School of Mechanical and Power Engineering, Chongqing University of Science and Technology, Chongqing, China
DOI: https://doi.org/10.1515/msr-2018-0035 | Journal eISSN: 1335-8871
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Language: English
Page range: 256 - 261
Submitted on: Jul 19, 2018
|
Accepted on: Nov 5, 2018
|
Published on: Nov 30, 2018
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
Electrostatic force microscopy,
surface morphology,
precise measurement,
scanning probe microscopy
Related subjects:
Engineering,
Electrical engineering,
Control engineering, metrology and testing

© 2018 Gaofa He, Jie Meng, Renbing Tan, Peng Zhong, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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