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Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness
DOI: https://doi.org/10.1515/msr-2015-0034 | Journal eISSN: 1335-8871
Language: English
Page range: 248 - 255
Submitted on: Feb 4, 2015
Accepted on: Sep 30, 2015
Published on: Oct 29, 2015
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
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© 2015 Q. Liang, W. Wu, D. Zhang, B. Wei, W. Sun, Y. Wang, Y. Ge, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.