Have a personal or library account? Click to login

Application of radio frequency inductively coupled plasma in chemical vapor deposition process of diamond-like carbon films for modification of properties of deposited films

Materials Science-Poland
Volume 36 (2018): Issue 1 (March 2018)
By:
Open Access
|May 2018

References

  1. [1] ROBERTSON J., Mat. Sci. Eng. B-Adv., 37 (2002), 129.
    Search in Google ScholarBack to article
  2. [2] DONNET C., ERDEMIR A., Tribology of Diamond-Like Carbon Films: Fundamentals and Applications, Springer, 2008.
    Search in Google ScholarBack to article
  3. [3] TOMOZEIU N., HART A., KLEINSORGE B., MILNE W.I., Diam. Relat. Mater., 8 (1999), 522.
    Search in Google ScholarBack to article
  4. [4] HAUERT R., Diam. Relat. Mater., 12 (2003), 583.
    Search in Google ScholarBack to article
  5. [5] GRONING O., KUTTEL O.M., GRONING P., SCHLAPBACH L., Appl. Surf. Sci., 111 (1997), 135.
    Search in Google ScholarBack to article
  6. [6] ROBERTSON J., Phys. Status Solidi A, 205 (9) (2008), 2233.
    Search in Google ScholarBack to article
  7. [7] BEWILOGUA K., HOFMANN D., Surf. Coat. Tech., 242 (2014), 214.
    Search in Google ScholarBack to article
  8. [8] HORNG R.H., KAO W.C., OU S.L., WUU D.S., Appl. Phys. Lett., 101 (2012), 171102.
    Search in Google ScholarBack to article
  9. [9] DEARNALEY G., ARPS J. H., Surf. Coat. Tech., 200 (2005), 2518.
    Search in Google ScholarBack to article
  10. [10] GRONAU R., SZMIDT J., FIREK P., CZERWOSZ E., JARZY´NSKA D., STARYGA E., Vacuum, 82 (2008), 962.
    Search in Google ScholarBack to article
  11. [11] OLESZKIEWICZ W., MARKOWSKI J., SRNANEK R., KIJASZEK W., GRYGLEWICZ J., KOV˘AˇC J., TŁACZAŁA M., Opt. Appl., 43 (1) (2013), 109.
    Search in Google ScholarBack to article
  12. [12] OLESZKIEWICZ W., KIJASZEK W., GRYGLEWICZ J., ZAKRZEWSKI A., GAJEWSKI K., KOPIEC D., KAMYCZEK P., POPKO E., TŁACZAŁA M., Proc. SPIE, 8902 (2013), 89022H.
    Search in Google ScholarBack to article
  13. [13] LEE K.R., EUN K.Y., LEE S., JEON D.R., Thin Solid Films, 290 - 291 (1996), 171.
    Search in Google ScholarBack to article
  14. [14] UMEHARA Y., MURAI S., KOIDE Y., MURAKAMI M., Diam. Relat. Mater., 11 (2002), 1429.
    Search in Google ScholarBack to article
  15. [15] ZUBEL I., GRANEK F., ROLA K., BANASZCZYK K., Appl. Surf. Sci., 258 (22) (2012), 9067.
    Search in Google ScholarBack to article
  16. [16] SHI J.R., SHI X., SUN Z., LAU S.P., TAY B.K., TAN H.S., Diam. Relat. Mater., 10 (2001), 76.
    Search in Google ScholarBack to article
  17. [17] CUI W.G., LAI Q.B., ZHANG L., WANG F.M., Surf. Coat. Tech., 205 (2010), 1995.
    Search in Google ScholarBack to article
  18. [18] INOMOTO H., HATTA A., KAWABATA K., KATODA T., HIRAKI A., Diam. Relat. Mater, 9 (2000), 1209.
    Search in Google ScholarBack to article
DOI: https://doi.org/10.1515/msp-2017-0119 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Journal RSS Feed
Language: English
Page range: 80 - 85
Submitted on: Apr 3, 2017
Accepted on: Jan 24, 2018
Published on: May 18, 2018
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
diamond-like carbon,
RF ICP PECVD,
Raman scattering spectroscopy,
field emission
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2018 Wojciech Kijaszek, Waldemar Oleszkiewicz, Zbigniew Znamirowski, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Previous articleVolume 36 (2018): Issue 1 (March 2018)Next article