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Effect of electron beam injection on boron redistribution in silicon and oxide layer Cover

Effect of electron beam injection on boron redistribution in silicon and oxide layer

Materials Science-Poland
Volume 35 (2017): Issue 1 (March 2017)
By: Shiqiang Qin,  Yi Tan,  Jiayan Li,  Dachuan Jiang,  Shutao Wen and  Shuang Shi  
Open Access
|Feb 2017

Authors

Shiqiang Qin

School of Materials Science and Engineering, Dalian University of Technology, Dalian, China
Key Laboratory for Solar Energy Photovoltaic System of Liaoning Province, Dalian, China

Yi Tan

School of Materials Science and Engineering, Dalian University of Technology, Dalian, China
Key Laboratory for Solar Energy Photovoltaic System of Liaoning Province, Dalian, China

Jiayan Li

lnsolar@dlut.edu.cn

School of Materials Science and Engineering, Dalian University of Technology, Dalian, China
Key Laboratory for Solar Energy Photovoltaic System of Liaoning Province, Dalian, China

Dachuan Jiang

School of Materials Science and Engineering, Dalian University of Technology, Dalian, China
Key Laboratory for Solar Energy Photovoltaic System of Liaoning Province, Dalian, China

Shutao Wen

School of Materials Science and Engineering, Dalian University of Technology, Dalian, China
Key Laboratory for Solar Energy Photovoltaic System of Liaoning Province, Dalian, China

Shuang Shi

School of Materials Science and Engineering, Dalian University of Technology, Dalian, China
Key Laboratory for Solar Energy Photovoltaic System of Liaoning Province, Dalian, China
DOI: https://doi.org/10.1515/msp-2017-0027 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 14 - 17
Submitted on: Feb 29, 2016
Accepted on: Jan 15, 2017
Published on: Feb 24, 2017
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
electron beam injection,
silicon,
solar energy materials,
boron,
oxidation
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2017 Shiqiang Qin, Yi Tan, Jiayan Li, Dachuan Jiang, Shutao Wen, Shuang Shi, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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