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The impact of medium frequency pulsed magnetron discharge power on the single probe Langmuir measurements and resulted plasma parameters Cover

The impact of medium frequency pulsed magnetron discharge power on the single probe Langmuir measurements and resulted plasma parameters

Materials Science-Poland
Volume 34 (2016): Issue 2 (June 2016)
By:  and    
Open Access
|Apr 2016
Authors

Authors

A Wiatrowski

Artur.Wiatrowski@pwr.edu.pl

W.M Posadowski

DOI: https://doi.org/10.1515/msp-2016-0012 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 374 - 385
Submitted on: Oct 13, 2015
Accepted on: Nov 22, 2015
Published on: Apr 20, 2016
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
titanium,
copper,
magnetron sputtering,
pulsed magnetron sputtering,
medium frequency pulsed magnetron sputtering,
Langmuir probe measurements,
Dora Power Systems
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2016 A Wiatrowski, W.M Posadowski, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Volume 34 (2016): Issue 2 (June 2016)
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