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The impact of medium frequency pulsed magnetron discharge power on the single probe Langmuir measurements and resulted plasma parameters Cover

The impact of medium frequency pulsed magnetron discharge power on the single probe Langmuir measurements and resulted plasma parameters

By: A Wiatrowski and  W.M Posadowski  
Open Access
|Apr 2016
DOI: https://doi.org/10.1515/msp-2016-0012 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Language: English
Page range: 374 - 385
Submitted on: Oct 13, 2015
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Accepted on: Nov 22, 2015
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Published on: Apr 20, 2016
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year

© 2016 A Wiatrowski, W.M Posadowski, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.