Morphological features in aluminum nitride epilayers prepared by magnetron sputtering
By:
Language: English
Page range: 175 - 184
Submitted on: Sep 2, 2014
Accepted on: Dec 1, 2014
Published on: Mar 13, 2015
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
Related subjects:
© 2015 Sebastian Stach, Dinara Dallaeva, Ştefan Ţălu, Pavel Kaspar, Pavel Tománek, Stefano Giovanzana, Lubomír Grmela, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.