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Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Materials Science-Poland
Volume 33 (2015): Issue 1 (March 2015)
By:
Open Access
|Mar 2015

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DOI: https://doi.org/10.1515/msp-2015-0036 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 175 - 184
Submitted on: Sep 2, 2014
Accepted on: Dec 1, 2014
Published on: Mar 13, 2015
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
aluminum nitride epilayer,
atomic force microscopy,
magnetron sputtering,
substrate,
surface roughness
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2015 Sebastian Stach, Dinara Dallaeva, Ştefan Ţălu, Pavel Kaspar, Pavel Tománek, Stefano Giovanzana, Lubomír Grmela, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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