Computer simulation of sputtering of graphite target in magnetron sputtering device with two zones of erosion
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Language: English
Page range: 82 - 94
Submitted on: May 21, 2014
Accepted on: Sep 20, 2014
Published on: Mar 13, 2015
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
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© 2015 R.V. Bogdanov, O.M. Kostiukevych, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.