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Computer simulation of sputtering of graphite target in magnetron sputtering device with two zones of erosion Cover

Computer simulation of sputtering of graphite target in magnetron sputtering device with two zones of erosion

Materials Science-Poland
Volume 33 (2015): Issue 1 (March 2015)
By: R.V. Bogdanov and  O.M. Kostiukevych  
Open Access
|Mar 2015

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DOI: https://doi.org/10.1515/msp-2015-0001 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 82 - 94
Submitted on: May 21, 2014
|
Accepted on: Sep 20, 2014
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Published on: Mar 13, 2015
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
Monte Carlo computer simulation,
magnetron sputtering,
flux of particles,
carbon,
graphite target,
energy of particles
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2015 R.V. Bogdanov, O.M. Kostiukevych, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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