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Computer simulation of sputtering of graphite target in magnetron sputtering device with two zones of erosion

Materials Science-Poland
Volume 33 (2015): Issue 1 (March 2015)
By:
Open Access
|Mar 2015

References

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DOI: https://doi.org/10.1515/msp-2015-0001 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 82 - 94
Submitted on: May 21, 2014
Accepted on: Sep 20, 2014
Published on: Mar 13, 2015
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
Monte Carlo computer simulation,
magnetron sputtering,
flux of particles,
carbon,
graphite target,
energy of particles
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2015 R.V. Bogdanov, O.M. Kostiukevych, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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