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Study of Copper Nitride Thin Film Structure Cover

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DOI: https://doi.org/10.1515/lpts-2016-0011 | Journal eISSN: 2255-8896 (formerly 0868-8257) | Journal ISSN: 0868-8257
Language: English
Page range: 31 - 37
Published on: May 20, 2016
Published by: Institute of Physical Energetics
In partnership with: Paradigm Publishing Services

© 2016 A. Kuzmin, A. Kalinko, A. Anspoks, J. Timoshenko, R. Kalendarev, published by Institute of Physical Energetics
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.