Study of Copper Nitride Thin Film Structure
By: A. Kuzmin, A. Kalinko, A. Anspoks, J. Timoshenko and R. Kalendarev
Abstract
X-ray diffraction and x-ray absorption spectroscopy at the Cu K-edge were used to study the atomic structure in copper nitride (Cu3N) thin films. Textured nanocrystalline films are obtained upon dc magnetron sputtering on substrates heated at about 190 °C, whereas amorphous films having strongly disordered structure already in the second coordination shell of copper are deposited in the absence of heating.
Language: English
Page range: 31 - 37
Published on: May 20, 2016
Published by: Institute of Physical Energetics
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
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© 2016 A. Kuzmin, A. Kalinko, A. Anspoks, J. Timoshenko, R. Kalendarev, published by Institute of Physical Energetics
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.