Scanning electron microscope fine tuning using four-bar piezoelectric actuated mechanism

Khaled S. Hatamleh; Qais A. Khasawneh; Adnan Al-Ghasem; Mohammad A. Jaradat; Laith Sawaqed; Mohammad Al-Shabi

doi:10.1515/jee-2018-0003

Abstract

Scanning Electron Microscopes are extensively used for accurate micro/nano images exploring. Several strategies have been proposed to fine tune those microscopes in the past few years. This work presents a new fine tuning strategy of a scanning electron microscope sample table using four bar piezoelectric actuated mechanisms. The introduced paper presents an algorithm to find all possible inverse kinematics solutions of the proposed mechanism. In addition, another algorithm is presented to search for the optimal inverse kinematic solution. Both algorithms are used simultaneously by means of a simulation study to fine tune a scanning electron microscope sample table through a pre-specified circular or linear path of motion. Results of the study shows that, proposed algorithms were able to minimize the power required to drive the piezoelectric actuated mechanism by a ratio of 97.5% for all simulated paths of motion when compared to general non-optimized solution.

References

[1] B. Deshmukh, S. Pardeshi, R. Mistry, S. Kandharkar, and S. Wagh, “Development of a Four Bar Compliant Mechanism using Pseudo Rigid Body Model (PRBM)”, Procedia Mater. Sci., vol. 6, no. Icmpc, pp. 1034–1039, 2014.
Search in Google Scholar Back to article
[2] G. B. Madhab, C. S. Kumar, and P. K. Mishra, “Modelling and Control of a Bio-Inspired Microgripper”, Int. J. Manuf. Technol. Manag., vol. 21, no. 1/2, p. 160, 2010.10.1504/IJMTM.2010.034294
Search in Google Scholar Back to article
[3] K. T. Ooi, “Simulation of a Piezo-Compressor”, Appl. Therm. Eng., vol. 24, no. 4, pp. 549–562, Mar 2004.10.1016/j.applthermaleng.2003.09.008
Search in Google Scholar Back to article
[4] A. Batagiannis, M. Wbbenhorst, and J. Hulliger, “Piezo- and Pyroelectric Microscopy”, Curr. Opin. Solid State Mater. Sci., vol. 14, no. 5, pp. 107–115, Oct 2010.10.1016/j.cossms.2010.06.002
Open DOI Search in Google Scholar Back to article
[5] A.-F. Boukari, J.-C. Carmona, G. Moraru, F. Malburet, A. Chaaba, and M. Douimi, “Piezo-Actuators Modeling for Smart Applications”, Mechatronics, vol. 21, no. 1, pp. 339–349, Feb 2011.10.1016/j.mechatronics.2010.12.005
Search in Google Scholar Back to article
[6] V. Hassani and T. Tjahjowidodo, “Dynamic Modeling of 3-DOF Pyramidal-Shaped Piezo-Driven Mechanism”, Mechanism and Machine Theory, vol. 70, pp. 225–245, Dec 2013.10.1016/j.mechmachtheory.2013.07.011
Open DOI Search in Google Scholar Back to article
[7] H.-Y. Chen and J.-W. Liang, “Control of a 3D Piezo-Actuating Table by Using an Adaptive Sliding-Mode Controller for a Drilling Process”, Comput. Math. with Appl., vol. 64, no. 5, pp. 1226–1234, Sep 2012.10.1016/j.camwa.2012.03.066
Open DOI Search in Google Scholar Back to article
[8] Y. Tian, B. Shirinzadeh, and D. Zhang, “A Flexure-Based Mechanism and Control Methodology for Ultra-Precision Turning Operation”, /sl Precis. Eng.(, vol. 33, no. 2, pp. 160–166, Apr 2009.10.1016/j.precisioneng.2008.05.001
Search in Google Scholar Back to article
[9] Q. Xu, “Design, Testing and Precision Control of a Novel Long-Stroke Flexure Micropositioning System”, Mechanism and machine Theory, vol. 70, pp. 209–224, Dec2013.10.1016/j.mechmachtheory.2013.07.016
Search in Google Scholar Back to article
[10] H. C. Liaw, B. Shirinzadeh, and J. Smith, “Robust Motion Tracking Control of Piezo-Driven Flexure-Based Four-BarMechanism for Micro/Nano Manipulation”, Mechatronics, vol. 18, no. 2, pp. 111–120, Mar 2008.10.1016/j.mechatronics.2007.09.002
Search in Google Scholar Back to article
[11] H. C. Liaw and B. Shirinzadeh, “Enhanced Adaptive Motion Tracking Control of Piezo-Actuated Flexure-Based Four-Bar Mechanisms for Micro/Nano Manipulation”, Sensors Actuators A Phys., vol. 147, no. 1, pp. 254–262, Sep 2008.10.1016/j.sna.2008.03.020
Search in Google Scholar Back to article
[12] M.-J. Yang, G.-Y. Gu, and L.-M. Zhu, “High-Bandwidth Tracking Control of Piezo-Actuated Nanopositioning Stages Using Closed-Loop Input Shaper”, Mechatronics, vol. 24, no. 6, pp. 724–733, Sep 2014.10.1016/j.mechatronics.2014.02.014
Open DOI Search in Google Scholar Back to article
[13] Y. Qin, B. Shirinzadeh, Y. Tian, and D. Zhang, “Design Issues in a Decoupled XY Stage: Static and Dynamics Modeling, Hysteresis Compensation, and Tracking Control”, Sensors Actuators A Phys., vol. 194, pp. 95–105, May 2013.10.1016/j.sna.2013.02.003
Search in Google Scholar Back to article
[14] S. S. Aphale, A. Ferreira, and S. O. R. Moheimani, “A Robust Loop-Shaping Approach to Fast and Accurate Nanopositioning”, Sensors Actuators A Phys., vol. 204, pp. 88–96, Dec 2013.10.1016/j.sna.2013.10.006
Search in Google Scholar Back to article
[15] P. V. Chanekar and A. Ghosal, “Optimal Synthesis of Adjustable Planar Four-Bar Crank-Rocker Type Mechanisms for Approximate Multi-path Generation”, Mechanism and Machine Theory, vol. 69, pp. 263–277, July 2013.10.1016/j.mechmachtheory.2013.06.006
Search in Google Scholar Back to article
[16] M. Khorshidi, M. Soheilypour, M. Peyro, A. Atai, and M. Shariat Panahi, “Optimal Design of Four-Bar Mechanisms Using a Hybrid Multi-Objective GA with Adaptive Local Search”, Mechanism and Machine Theory, vol. 46, no. 10, pp. 1453–1465, Oct 2011.
Search in Google Scholar Back to article
[17] S. Ebrahimi, and P. Payvandy, “Efficient Constrained Synthesis of Path Generating Four-Bar Mechanisms Based on the Heuristic Optimization Algorithms”, Mechanism and Machine Theory, vol. 85, pp. 189–204, Dec 2015.10.1016/j.mechmachtheory.2014.11.021
Search in Google Scholar Back to article
[18] M. Sitti, “Piezoelectrically Actuated Four-Bar Mechanism with Two Flexible Links for Micromechanical Flying Insect Thorax”, /IEEE/ASME Trans. Mechatronics(, vol. 8, no. 1, pp. 26–36, Mar 2003.10.1109/TMECH.2003.809126
Search in Google Scholar Back to article
[19] H. C. Liaw and B. Shirinzadeh, “Robust Generalised Impedance Control of Piezo-Actuated Flexure-Based Four-Bar Mechanisms for Micro/Nano Manipulation”, Sensors Actuators A Phys., vol. 148, no. 2, pp. 443–453, Dec 2008.10.1016/j.sna.2008.09.006
Search in Google Scholar Back to article
[20] H. Tang, Y. Li, and J. Huang, “Design and Analysis of a Dual-Mode Driven Parallel XY Micromanipulator for Micro/Nanomanipulations”, Proc. Inst. Mech. Eng. Part C J. Mech.Eng. Sci., vol. 226, no. 12, pp. 3043–3057, Mar 2012.
Search in Google Scholar Back to article
[21] X. Zhang, J. Lu, and Y. Shen, “Active Noise Control of Flexible Linkage Mechanism with Piezoelectric Actuators”, Comput. Struct., vol. 81, no. 20, pp. 2045–2051, Aug 2003.
Search in Google Scholar Back to article
[22] A. Trevisani, “Feedback Control of Flexible Four-Bar Linkages: a Numerical and Experimental Investigation”, J. Sound Vib., vol. 268, no. 5, pp. 947–970, Dec 2003.10.1016/S0022-460X(03)00376-6
Search in Google Scholar Back to article
[23] M. Y. Al-Azzeh, “Employing Piezoelectric Actuators Manipulating Robots”, MSc Thesis, Jordan University of Science & Technology. Dec 2010.
Search in Google Scholar Back to article
[24] H. K. Khalaf, “Active Control of A Piezoelectric Actuated Four-Bar Mechanism Deployed Robotics Applications”, MSc Thesis, Jordan University of Science & Technology. Dec 2012.
Search in Google Scholar Back to article

Scanning electron microscope fine tuning using four-bar piezoelectric actuated mechanism

Abstract

Paradigm

My account