Morphology and FT IR spectra of porous silicon

Kopani, Martin; Mikula, Milan; Kosnac, Daniel; Gregus, Jan; Pincik, Emil

doi:10.1515/jee-2017-0056

Abstract

The morphology and chemical bods of p-type and n-type porous Si was compared. The surface of n-type sample is smooth, homogenous without any features. The surface of p-type sample reveals micrometer-sized islands. FTIR investigation reveals various distribution of SiO_xH_y complexes in both p-and n-type samples. From the conditions leading to porous silicon layer formation (the presence of holes) we suggest both SiO_xH_y and SiF_xH_y complexes in the layer.

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Morphology and FT IR spectra of porous silicon

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