Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer
Sysoev, E., Kulikov, R., Vykhristyuk, I., Chugui, Yu.
3D Optical Measuring Systems and Laser Technologies for Scientific and Industrial Applications
Chugui, Yu., Verkhoglyad, A., Poleshchuk, A., Korolkov, V., Sysoev, E., Zavyalov, P.