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Development and Fabrication of TiO2 Tip Arrays for Gas Sensing Cover

Development and Fabrication of TiO2 Tip Arrays for Gas Sensing

Journal of Electrical Engineering
Volume 62 (2011): Issue 6 (November 2011)
By: Ivan Hotový,  Ivan Kostič,  Štefan HAščík,  Vlastimil ŘEháček,  Jozef Liday and  Helmut Sitter  
Open Access
|Dec 2011

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DOI: https://doi.org/10.2478/v10187-011-0058-3 | Journal eISSN: 1339-309X | Journal ISSN: 1335-3632
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Language: English
Page range: 363 - 366
Published on: Dec 21, 2011
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
Keywords:
TiO2 thin films,
dc magnetron sputtering,
reactive ion etching,
electron beam lithography,
tip array
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2011 Ivan Hotový, Ivan Kostič, Štefan HAščík, Vlastimil ŘEháček, Jozef Liday, Helmut Sitter, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons License.

Volume 62 (2011): Issue 6 (November 2011)