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Structural Evolution of Sputtered Indium Oxide Thin Films Cover

Structural Evolution of Sputtered Indium Oxide Thin Films

Journal of Electrical Engineering
Volume 61 (2010): Issue 6 (November 2010)
By: ,  ,  ,  ,  ,  ,  ,  ,  ,   and    
Open Access
|Jun 2011
Authors

Authors

Ivan Hotový

Thomas Kups

Juraj Hotový

Jozef Liday

Dalibor Búc

Mária Čaplovičová

Vlastimil Řeháček

Helmut Sitter

Clemens Simbrunner

Alberta Bonnani

Lothar Spiess

DOI: https://doi.org/10.2478/v10187-010-0059-7 | Journal eISSN: 1339-309X | Journal ISSN: 1335-3632
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Language: English
Page range: 382 - 385
Published on: Jun 7, 2011
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
Keywords:
In2O3 thin films,
dc magnetron sputtering,
structure,
cubic indium oxide,
rhombohedral indium oxide
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2011 Ivan Hotový, Thomas Kups, Juraj Hotový, Jozef Liday, Dalibor Búc, Mária Čaplovičová, Vlastimil Řeháček, Helmut Sitter, Clemens Simbrunner, Alberta Bonnani, Lothar Spiess, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons License.

Volume 61 (2010): Issue 6 (November 2010)