Structural Evolution of Sputtered Indium Oxide Thin Films

Ivan Hotový; Thomas Kups; Juraj Hotový; Jozef Liday; Dalibor Búc; Mária Čaplovičová; Vlastimil Řeháček; Helmut Sitter; Clemens Simbrunner; Alberta Bonnani; Lothar Spiess

doi:10.2478/v10187-010-0059-7

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Structural Evolution of Sputtered Indium Oxide Thin Films

Journal of Electrical Engineering

Volume 61 (2010): Issue 6 (November 2010)

By: Ivan Hotový, Thomas Kups, Juraj Hotový, Jozef Liday, Dalibor Búc, Mária Čaplovičová, Vlastimil Řeháček, Helmut Sitter, Clemens Simbrunner, Alberta Bonnani and Lothar Spiess

Open Access

|Jun 2011

Abstract

The indium oxide thin films were deposited at room temperature by reactive magnetron sputtering in the mixture of oxygen and argon on silicon and oxidized silicon substrates. The influence of the oxygen flow in the reactive mixture and post-deposition annealing on the structural properties were investigated. The as deposited In₂O₃ films showed a dominating randomly oriented nanocrystalline structure of cubic In₂O₃. The grain size decreased with increasing oxygen concentration in the plasma. Annealing in reducing atmospheres (vacuum, nitrogen and argon), besides improving the crystallinity, led to a partial cubic to rhombohedral phase transition in the indium oxide films.

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Articles in this issue

DOI: https://doi.org/10.2478/v10187-010-0059-7 | Journal eISSN: 1339-309X | Journal ISSN: 1335-3632

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Language: English

Page range: 382 - 385

Published on: Jun 7, 2011

Published by: Slovak University of Technology in Bratislava

In partnership with: Paradigm Publishing Services

Publication frequency: 6 issues per year

Keywords:

In₂O₃ thin films,

dc magnetron sputtering,

structure,

cubic indium oxide,

rhombohedral indium oxide

Related subjects:

Engineering,

Introductions and overviews,

Engineering, other

© 2011 Ivan Hotový, Thomas Kups, Juraj Hotový, Jozef Liday, Dalibor Búc, Mária Čaplovičová, Vlastimil Řeháček, Helmut Sitter, Clemens Simbrunner, Alberta Bonnani, Lothar Spiess, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons License.

Volume 61 (2010): Issue 6 (November 2010)