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Contribution to the Quantitative Analysis of Ternary Alloys of Group III-Nitrides by Auger Spectroscopy Cover

Contribution to the Quantitative Analysis of Ternary Alloys of Group III-Nitrides by Auger Spectroscopy

Journal of Electrical Engineering
Volume 61 (2010): Issue 1 (January 2010)
By: ,  ,  ,   and    
Open Access
|Jun 2011
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DOI: https://doi.org/10.2478/v10187-010-0009-4 | Journal eISSN: 1339-309X | Journal ISSN: 1335-3632
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Language: English
Page range: 62 - 64
Published on: Jun 7, 2011
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
Keywords:
GaN,
AlN,
AlxGa1-xN,
AES relative elemental sensitivity factors,
component sputtering yields YGa/YAl
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2011 Jozef Liday, Gernod Ecke, Tim Baumann, Peter Vogrinčič, Juraj Breza, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons License.

Volume 61 (2010): Issue 1 (January 2010)