Influence of thermal treatment on the formation of ohmic contacts based on Ti/Al/Ni/Au metallization to n-type AlGaN/GaN heterostructures

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Open Access

|Dec 2012

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DOI: https://doi.org/10.2478/s13536-012-0051-y | Journal eISSN: 2083-134X (formerly 2083-124X) | Journal ISSN: 2083-1331

Language: English

Page range: 342 - 347

Published on: Dec 14, 2012

Published by: Wroclaw University of Science and Technology

In partnership with: Paradigm Publishing Services

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© 2012 W. Macherzyński, B. Paszkiewicz, A. Vincze, R. Paszkiewicz, M. Tłaczała, J. Kováč, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.