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Influence of thermal treatment on the formation of ohmic contacts based on Ti/Al/Ni/Au metallization to n-type AlGaN/GaN heterostructures Cover

Influence of thermal treatment on the formation of ohmic contacts based on Ti/Al/Ni/Au metallization to n-type AlGaN/GaN heterostructures

Materials Science-Poland
Volume 30 (2012): Issue 4 (December 2012)
By: W. Macherzyński,  B. Paszkiewicz,  A. Vincze,  R. Paszkiewicz,  M. Tłaczała and  J. Kováč  
Open Access
|Dec 2012

Authors

W. Macherzyński

wojciech.macherzynski@pwr.wroc.pl

B. Paszkiewicz

A. Vincze

R. Paszkiewicz

M. Tłaczała

J. Kováč

DOI: https://doi.org/10.2478/s13536-012-0051-y | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 342 - 347
Published on: Dec 14, 2012
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
ohmic contact,
AlGaN/GaN heterostructure,
2-dimensional electron gas (2DEG)
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2012 W. Macherzyński, B. Paszkiewicz, A. Vincze, R. Paszkiewicz, M. Tłaczała, J. Kováč, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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